Tunable coupling of two mechanical resonators by a graphene membrane

Abstract Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, joint clamping point of or displacement-dependent force. Here we show graphene-integrated electromechanical system consisting two physically separated resonators—a hybrid graphene comb-drive actuator suspended silicon beam—that tunably coupled integrated membrane. The membrane, moreover, provides sensitive electrical read-out resonating showing 16 different modes frequency range from 0.4 to 24 MHz. In addition, pulling on membrane with an electrostatic potential applied beam resonator, control coupling, quantified g -factor, 20 kHz 100 kHz. Our results pave way nanoelectromechanical requiring controllable mechanically resonators.